| Rank | 2352 |
|---|---|
| Abbreviated Journal | MAT SCI SEMICON PROC |
| Publisher | ELSEVIER SCI LTD |
| Year | 2024 |
| ISSN | 1369-8001 |
| eISSN | 1873-4081 |
| Total Cites | 21632 |
| Total Articles | 951 |
| Citable Items | 997 |
| Cited Half-Life | 3.8 |
| Citing Half-Life | 5.9 |
| Impact Factor | 4.600 |
| 5-Year JIF | 4.200 |
| JIF Without Self-Cites | 4.300 |
| JCI | 0.870 |
| JIF Quartile | Q2 |
| JIF Rank | 95/366 |